Study programme 2017-2018 | Français | ||
Ingénierie des couches minces | |||
Activité d'apprentissage à la Faculty of Engineering |
Code | Lecturer(s) | Associate Lecturer(s) | Subsitute Lecturer(s) et other(s) |
---|---|---|---|
I-META-026 |
|
Language of instruction | Language of assessment | HT(*) | HTPE(*) | HTPS(*) | HR(*) | HD(*) | Term |
---|---|---|---|---|---|---|---|
Français | Français | 15 | 3 | 0 | 0 | 0 | Q1 |
Content of Learning Activity
Introduction to vacuum technology; Theory and practice of physical vapor deposition (sputtering, evaporation and similar methods) Theory and practice of chemical vapor deposition (CVD, ALD ans similar methods) Thin film deposition in liquid phase: sol-gel methods and self assembly Growth of thin films
Required Learning Resources/Tools
Not applicable
Recommended Learning Resources/Tools
slides used during class.
Other Recommended Reading
Not applicable
Mode of delivery
Type of Teaching Activity/Activities
Evaluations
The assessment methods of the Learning Activity (AA) are specified in the course description of the corresponding Educational Component (UE)